Substrate Bias Effect of 28 nm-node HK/MG nMOSFETs with DPN Temperature Treatments

Chao, Shou-Yen; Wang, Ming-Han; Zheng, Mei-Yuan; Kuo, Jin-An; Lan, Wen-How; He, Yuan-Jheng; Wang, Mu-Chun

doi:10.1109/wipdaasia58218.2023.10261907

2023 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia) 2023

DOI: 10.1109/wipdaasia58218.2023.10261907

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Substrate Bias Effect of 28 nm-node HK/MG nMOSFETs with DPN Temperature Treatments

Shou-Yen Chao,

Ming-Han Wang,

Mei-Yuan Zheng

et al.

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Substrate Bias Effect of 28 nm-node HK/MG nMOSFETs with DPN Temperature Treatments

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