2011 16th International Solid-State Sensors, Actuators and Microsystems Conference 2011
DOI: 10.1109/transducers.2011.5969574
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Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

Abstract: We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel … Show more

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Cited by 3 publications
(1 citation statement)
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“…With simple periodic patterns, it is possible to measure position accurately by feature-detection, as Clarck et al [5], or by Fourier-like processing, as Yamahata et al [6], but in these cases the absolute range is limited to one period. The most common solution to improve the range is to combine a large encoding to the periodicity.…”
Section: Introductionmentioning
confidence: 99%
“…With simple periodic patterns, it is possible to measure position accurately by feature-detection, as Clarck et al [5], or by Fourier-like processing, as Yamahata et al [6], but in these cases the absolute range is limited to one period. The most common solution to improve the range is to combine a large encoding to the periodicity.…”
Section: Introductionmentioning
confidence: 99%