2016
DOI: 10.1117/12.2227961
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Subaperture method for aspheric surface metrology using curvature data

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“…The curvatures thus obtained are arranged in a determinant according to the position of the sub-apertures and replaced by the gradient matrix at each point through the curvature-slope relation such as Frenet's equation. Finally, the wavefront estimation is performed using the Southwell or Simpson method based on the obtained gradient matrix, 3D surface profile can be reconstructed through the entire clear aperture 4 .…”
Section: Sub-aperture Stitching Interferometry Principlesmentioning
confidence: 99%
“…The curvatures thus obtained are arranged in a determinant according to the position of the sub-apertures and replaced by the gradient matrix at each point through the curvature-slope relation such as Frenet's equation. Finally, the wavefront estimation is performed using the Southwell or Simpson method based on the obtained gradient matrix, 3D surface profile can be reconstructed through the entire clear aperture 4 .…”
Section: Sub-aperture Stitching Interferometry Principlesmentioning
confidence: 99%