Sub-picowatt resolution calorimetry with a bi-material microcantilever sensor

Canetta, Carlo; Narayanaswamy, Arvind

doi:10.1063/1.4795625

Cited by 42 publications

(25 citation statements)

References 24 publications

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“…Microcantilever heaters, which are extremely sensitive to changes in thermal parameters [16][17][18][19][20][21], have been widely utilized for calorimetry [16], thermal nanotopography [17] and thermal conductivity measurements [18]. Due to the small area of the microcantilever that needs to be heated (i.e.…”

Section: Introductionmentioning

confidence: 99%

Unique detection of organic vapors below their auto-ignition temperature using III–V Nitride based triangular microcantilever heater

Jahangir

Quddus

Koley

2016

Sensors and Actuators B: Chemical

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a b s t r a c tWe report on the unique detection of dilute volatile organic compounds below their auto-ignition temperature using a novel AlGaN/GaN heterostructure based triangular microcantilever heater. With a low input power of 12 mW, the microcantilever heater was found to reach a maximum temperature of 330 • C at the tip, which was verified through infrared microscopy and Raman spectroscopy. Unique threshold voltages were observed for various organic analytes with different functional groups, beyond which the heater current started to increase sharply in presence of analytes, which correlated strongly with their latent heat of evaporation. Dilute vapors with concentrations as low as 50 parts per million (ppm) could be detected selectively with a noise limited resolution down to 5 ppm. On the other hand, the magnitude of change of current for a fixed applied voltage was found to be dependent on the molecular dipole moment of the analytes, which can likely be attributed to the strong surface polarization of AlGaN. A simple circuit model has been proposed to explain the observations. Heat transfer and Joule heating simulations were performed using finite element method to model the electro-thermal characteristics of the microcantilever heater, which were in good agreement with the experimental observations.

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Section: Introductionmentioning

confidence: 99%

Unique detection of organic vapors below their auto-ignition temperature using III–V Nitride based triangular microcantilever heater

Jahangir

Quddus

Koley

2016

Sensors and Actuators B: Chemical

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“…[1][2][3][4][5][6][7][8][9][10] The bimaterial cantilevers have shown a potential as a novel uncooled IR detector by exhibiting IR sensitivity similar to traditional methods but with lower cost and faster response time ($0.1-1 ms). 1,11,12 Published research has shown that a bimaterial cantilever can detect radiative power of 250 pW/Hz 0.5 at the wavelength of 650 nm, 6 or 1.3 nW/Hz 0.5 at the wavelength of 10 lm. 3 Focal plane array of bimaterial cantilevers has noise equivalent temperature difference (NETD) of 50-200 mK, which is comparable to the NETD of the most recent microbolometer IR detectors, 35-200 mK.…”

Section: Introductionmentioning

confidence: 99%

Large infrared absorptance of bimaterial microcantilevers based on silicon high contrast grating

Kwon

Seong

Liu

et al. 2013

Journal of Applied Physics

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Manufacturing sensors for the mid-IR spectral region (3-11 lm) are especially challenging given the large spectral bandwidth, lack of convenient material properties, and need for sensitivity due to weak sources. Here, we present bimaterial microcantilevers based on silicon high contrast grating (HCG) as alternatives. The grating integrated into the cantilevers leverages the high refractive index contrast between the silicon and its surrounding medium, air. The cantilevers with HCG exhibit larger active spectral range and absorptance in mid-IR as compared to cantilevers without HCG. We design and fabricate two types of HCG bimaterial cantilevers such that the HCG resonance modes occur in mid-IR spectral region. Based on the measurements using a Fourier transform infrared (FTIR) microspectrometer, we show that the HCG cantilevers have 3-4X wider total IR absorptance bandwidths and 30% larger absorptance peak amplitude than the cantilever without HCG, over the 3-11 lm wavelength region. Based on the enhanced IR absorptance, HCG cantilevers show 13-47X greater responsivity than the cantilever without HCG. Finally, we demonstrate that the enhanced IR sensitivity of the HCG cantilever enables transmission IR spectroscopy with a Michelson interferometer. The HCG cantilever shows comparable signal to noise ratio to a low-end commercial FTIR system and exhibits a linear response to incident IR power. V C 2013 AIP Publishing LLC. [http://dx.

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“…While the primary laser is stabilized at constant power and only used for realizing a signal-to-noise ratio that is sufficiently high for a reliable readout in the OBD (described above), a second laser is mixed in for modulation of the incident power. 31 The power of this secondary laser is attenuated by a neutral density (ND) filter of optical density 3.0, to scale the optical output back to the required range. By closing the loop in this way, the measured flux is no longer obtained from the cantilever curvature, but in stead from the control signal of the secondary laser.…”

Section: Description Of the Setupmentioning

confidence: 99%

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

2016

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Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides subdiffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that are measured in tens of nanometers. For the instrument this poses two major challenges: 1) how to measure the distance to the sample? and 2) how to position accurately and at high speed? For the first challenge near-field thermal radiation is proposed as a mechanism for an integrated distance sensor (patent pending). This sensor is realized by making a sensitive calorimeter (accuracy of 2.31 nW root sum squared). When used for distance measurement an equivalent uncertainty of 1 nm can be achieved for distances smaller than 100 nm. By scanning the distance sensor over the sample, thermal profilometry is realized, which can be used to inspect surfaces in a non-intrusive and non-contact way. This reduces wear of the probe and minimizes the likelihood of damaging the sample.

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Sub-picowatt resolution calorimetry with a bi-material microcantilever sensor

Cited by 42 publications

References 24 publications

Unique detection of organic vapors below their auto-ignition temperature using III–V Nitride based triangular microcantilever heater

Unique detection of organic vapors below their auto-ignition temperature using III–V Nitride based triangular microcantilever heater

Large infrared absorptance of bimaterial microcantilevers based on silicon high contrast grating

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

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