Sub-Nanonmeter Position Control Using a Second Stage Actuator in Hard Disc Drives

Meyer, Dagmar; Gunderson, N.; Schulz, K.J.; Bordson, T.A.; Budde, Reinhard; Huha, M.A.; Jiang, Man; Sluzewski, D.A.; Wright, J.S.; Berg, L.J.

doi:10.31438/trf.hh2006.16

2006 Solid-State, Actuators, and Microsystems Workshop Technical Digest 2006

DOI: 10.31438/trf.hh2006.16

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Sub-Nanonmeter Position Control Using a Second Stage Actuator in Hard Disc Drives

Dagmar Meyer¹,

N. Gunderson²,

K.J. Schulz³

et al.

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Sub-Nanonmeter Position Control Using a Second Stage Actuator in Hard Disc Drives

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