Abstract:We successfully demonstrated the realization of fabricating protein sub-micro patterns for cell biology applications. To successfully generate the protein submicro patterns, some new designed procedures were involved into the DUV photolithography with micro contact printing process, such as TEOS film, RIE etching and AR3 coating. For the flexible aspect ratio requirements, TEOS film was added as a hard mask between photoresist and substrate for increasing the etching selectivity. According to our experimental … Show more
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