Sub-bandgap photo-response of black silicon fabricated by femtosecond laser irradiation under water
Xuan Wang,
Wenhan Du,
Yinghao Lun
et al.
Abstract:Here we propose a method to fabricate black Si without the need for any chalcogenide doping, accomplished by femtosecond (fs) laser irradiation in a liquid environment, aiming to fabricate the infrared detector and investigating their optoelectronic performance. Multi-scale laser-induced periodical surface structures (LIPSSs), containing micron sized grooves decorated with low spatial frequency ripples on the surface, can be clearly observed by SEM and 3D confocal microscope. The generated black Si demonstrate… Show more
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