Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Wachulak, P.; Bartels, Randy A.; Marconi, M. C.; Menoni, Carmen S.; Rocca, J. J.; Lu, Yunfeng; Parkinson, B. A.

doi:10.1364/oe.14.009636

Cited by 24 publications

(16 citation statements)

References 22 publications

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“…Small changes in z p reconstructs slightly different images. To determine the value of z p corresponding to the optimum reconstruction, a 2-D image correlation was used and is described in details in references (Wachulak et al, 2006(Wachulak et al, , 2007(Wachulak et al, , 2008c. To demonstrate retrieval of the depth information from the hologram the numerical reconstruction of the digitized hologram, shown in Fig.…”

Section: Results Of 3-d Holographic Imaging With Euv Lasermentioning

confidence: 99%

“…The reconstructed intensity image is then * (,) (,) (,) Uxy uxy ux y =⋅ . In recent experiments a high spatial resolution photoresist, usually utilized in electron beam lithography, was used for the recording of large numerical aperture (NA) holograms (Wachulak et al, 2006(Wachulak et al, , 2007(Wachulak et al, , 2008b. After developing, the holographic interference pattern was translated into a relief pattern in the surface of the photoresist and digitized using an atomic force microscope (AFM).…”

Section: Gabor In-line Euv Holographymentioning

confidence: 99%

“…Two holograms of an atomic force microscope tip were obtained using a compact table top EUV laser in a Gabor's in-line configuration, as described in detail in (Wachulak et al, 2006). This configuration is very easy to set up and robust, moreover, it requires neither optics nor critical beam alignment.…”

Section: Holographic 2-d Imaging Using Euv Lasersmentioning

confidence: 99%

See 2 more Smart Citations

Two and Three Dimensional Extreme Ultraviolet Holographic Imaging with a Nanometer Spatial Resolution

Wachulak¹,

Marconi²

2011

Advanced Holography - Metrology and Imaging

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Section: Results Of 3-d Holographic Imaging With Euv Lasermentioning

confidence: 99%

Section: Gabor In-line Euv Holographymentioning

confidence: 99%

See 1 more Smart Citation

Two and Three Dimensional Extreme Ultraviolet Holographic Imaging with a Nanometer Spatial Resolution

Wachulak¹,

Marconi²

2011

Advanced Holography - Metrology and Imaging

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“…6c. The hologram was numerically reconstructed with a Fresnel propagator [27] using approach similar to [28,29]. A plane wave was back-propagated by the Fresnel Zone Plate of focal length given by and rescaled by the geometric magnification equal to M = (z s + z p )∕z s of the object as it is projected onto the CCD where R(x, y) is the reconstructed image of the object in spatial domain, H(f x , f y ) is the hologram in the spatial frequency domain, F(f x , f y ) is the Fresnel zone plate propagator in the spatial frequency domain, and ℑ −1 denotes inverse 2D Fourier transform operation.…”

Section: Application Of Partially Coherent Euv Radiation From Xenon Pmentioning

confidence: 99%

Spatial coherence measurements of the EUV emission from laser-plasma source based on xenon/helium gas puff target

et al. 2017

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employed for important achievements in diffraction imaging [7], high-resolution holography [8], among others.Among compact sources, there are also sources that use gas-type targets to produce laser-plasma-emitting short wavelength radiation. These sources are often referred to as sources based on gas jets [9]. Variations of those are double stream gas puff targets, which inject not one but two gasses into the interaction region. While the inner gas is called working gas, which is the material of the target, to which a specific elemental emission can be attributed, the other, outer gas surrounds the inner gas shaping its flow and increasing its density in the interaction region. Such source was already proven to be useful so far for various applications in metrology [10], full-field imaging [11], photoionization [12], polymer surface modification [13], radiobiology [14], etc. All those applications were related to the use of spatially incoherent EUV and SXR radiation; however, to this day, it was never used for coherent-type applications.In this work, we would like to present the first to our knowledge attempt to obtain partially coherent EUV emission with usable photon flux from xenon/helium plasma, to perform coherent imaging experiments. We present the spatial coherence measurements, performed using Young double slit interferometry and demonstration of the use of such spatially coherent radiation to imaging. In the following chapters, the details about this work will be presented and discussed. Experimental setupThe experimental setup for spatial coherence measurements of the emission from xenon plasma is depicted in Fig. 1a. An Nd:YAG laser beam, produced by NL 129 laser system (10 J/1-10 ns), from EKSPLA, Lithuania, having Abstract In this paper, we present the first measurements of the partial spatial coherence of the EUV emission from xenon plasma in laser-plasma source, based on a double stream gas puff target. The Young double slit approach was employed to measure complex coherence factor of the EUV Xe emission at 13.5-nm wavelength in two orthogonal directions. The radius of coherence of ~60 μm was estimated at the distance of 2.1 m from the source. The number of coherently emitted photons was sufficient to demonstrate coherent imaging. Using partially coherent radiation from such source Gabor EUV holography was successfully demonstrated.

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“…Ptychographic techniques, usually based on employment of hard X-ray beams, although provide very high spatial resolution, are extensively time consuming during the reconstruction process [7]. Imaging in the EUV range permits to analyse very thin samples, nanofilms and nanostructures, because the EUV radiation is absorbed by solid materials with thicknesses of the order of 100 nm [8] and by gaseous materials with thicknesses of the order of a few millimetres [9]. Employing such radiation allows to visualize in a direct way through absorption contrast mechanism the flow of the gas, usually investigated with other techniques, such as the interferometry [10].…”

Section: Introductionmentioning

confidence: 99%

Nanoimaging using soft X-ray and EUV laser-plasma sources

Wachulak

Torrisi

Ayele

et al. 2018

EPJ Web of Conferences

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Abstract. In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the "waterwindow" spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

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Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Cited by 24 publications

References 22 publications

Two and Three Dimensional Extreme Ultraviolet Holographic Imaging with a Nanometer Spatial Resolution

Two and Three Dimensional Extreme Ultraviolet Holographic Imaging with a Nanometer Spatial Resolution

Spatial coherence measurements of the EUV emission from laser-plasma source based on xenon/helium gas puff target

Nanoimaging using soft X-ray and EUV laser-plasma sources

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