Sub-100 nm 2D nanopatterning on a large scale by ultrafast laser energy regulation

Saleh, Anthony Abou; Rudenko, Anton; Reynaud, Stéphanie; Pigeon, Florent; Garrelie, Florence; Colombier, Jean‐Philippe

doi:10.1039/c9nr09625f

Cited by 24 publications

(32 citation statements)

References 48 publications

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“…Other substantial parameters are the polarization angle between the two delayed pulses, number of pulses, pulse duration and initial surface roughness. Based on previous experiments, the chosen number of double-pulse sequences (N DPS ) was 25 pulses [25]. A cross-polarized ultrashort double pulses are applied in order to break the surface isotropy, avoiding the formation of LIPSS.…”

Section: Advanced Surface Topography Control As a Function Of Time Delay And Laser Fluencementioning

confidence: 99%

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Self-Organization Regimes Induced by Ultrafast Laser on Surfaces in the Tens of Nanometer Scales

et al. 2021

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A laser-irradiated surface is the paradigm of a self-organizing system, as coherent, aligned, chaotic, and complex patterns emerge at the microscale and even the nanoscale. A spectacular manifestation of dissipative structures consists of different types of randomly and periodically distributed nanostructures that arise from a homogeneous metal surface. The noninstantaneous response of the material reorganizes local surface topography down to tens of nanometers scale modifying long-range surface morphology on the impact scale. Under ultrafast laser irradiation with a regulated energy dose, the formation of nanopeaks, nanobumps, nanohumps and nanocavities patterns with 20–80 nm transverse size unit and up to 100 nm height are reported. We show that the use of crossed-polarized double laser pulse adds an extra dimension to the nanostructuring process as laser energy dose and multi-pulse feedback tune the energy gradient distribution, crossing critical values for surface self-organization regimes. The tiny dimensions of complex patterns are defined by the competition between the evolution of transient liquid structures generated in a cavitation process and the rapid resolidification of the surface region. Strongly influencing the light coupling, we reveal that initial surface roughness and type of roughness both play a crucial role in controlling the transient emergence of nanostructures during laser irradiation.

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Section: Advanced Surface Topography Control As a Function Of Time Delay And Laser Fluencementioning

confidence: 99%

“…Driven by near-field light enhancement, periodic patterns recently approached ultimate scales down to tens of nanometers [25]. A self-organization of unusual arrays of nanocavities of 20 nm diameter with a periodicity down to 60 nm was created on a Nickel surface oriented in (100) plan.…”

Section: Introductionmentioning

confidence: 99%

Self-Organization Regimes Induced by Ultrafast Laser on Surfaces in the Tens of Nanometer Scales

et al. 2021

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“…Pushing more the coupling between radiation and landscape, further record sizes can be demonstrated. Abou-Saleh et al [101] have indicated using double pulse sequences the emergence of other types of 2D high-resolution patterns (notably hexagonal), where the regulation concept comes from combining crossedpolarization and time-delay for irradiations close to the modification threshold. This particular parameter range promotes geometry complexity and, notably, structural size well below 100 nm.…”

Section: Focal Engineering and Near-field Processing: Sub-wavelength mentioning

confidence: 99%

“…A cavity is formed, surrounded by denser regions, with a dimension Reprinted with permission from a study by Nathala et al [23] ©Springer-Nature. (c) Nanohole pattern on single crystal surfaces irradiated with double pulse sequences with polarization control [101].…”

Section: Focal Engineering and Near-field Processing: Sub-wavelength mentioning

confidence: 99%

“…Transitions to order and ripples topographies were found to be sensitive to the excitation rate in view of the transient optical properties of the material [146][147][148]. Double pulse excitation schemes with variable polarization were applied to achieve a multitude of spatial structure patterns [149][150][151] and record light confinement [101]. A large range of hierarchical arrangements were then demonstrated [152].…”

Section: Observation and Control: Dynamic Coupling Between Light And mentioning

confidence: 99%

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Advances in ultrafast laser structuring of materials at the nanoscale

2020

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Laser processing implies the generation of a material function defined by the shape and the size of the induced structures, being a collective effect of topography, morphology, and structural arrangement. A fundamental dimensional limit in laser processing is set by optical diffraction. Many material functions are yet defined at the micron scale, and laser microprocessing has become a mainstream development trend. Consequently, laser microscale applications have evolved significantly and developed into an industrial grade technology. New opportunities will nevertheless emerge from accessing the nanoscale. Advances in ultrafast laser processing technologies can enable unprecedented resolutions and processed feature sizes, with the prospect to bypass optical and thermal limits. We will review here the mechanisms of laser processing on extreme scales and the optical and material concepts allowing us to confine the energy beyond the optical limits. We will discuss direct focusing approaches, where the use of nonlinear and near-field effects has demonstrated strong capabilities for light confinement. We will argue that the control of material hydrodynamic response is the key to achieve ultimate resolution in laser processing. A specific structuring process couples both optical and material effects, the process of self-organization. We will discuss the newest results in surface and volume self-organization, indicating the dynamic interplay between light and matter evolution. Micron-sized and nanosized features can be combined into novel architectures and arrangements. We equally underline a new dimensional domain in processing accessible now using laser radiation, the sub-100-nm feature size. Potential application fields will be indicated as the structuring sizes approach the effective mean free path of transport phenomena.

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Boosted Spontaneous Formation of High‐Aspect Ratio Nanopeaks on Ultrafast Laser‐Irradiated Ni Surface

et al. 2022

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The capacity to synthesize and design highly intricated nanoscale objects of different sizes, surfaces, and shapes dramatically conditions the development of multifunctional nanomaterials. Ultrafast laser technology holds great promise as a contactless process able to rationally and rapidly manufacture complex nanostructures bringing innovative surface functions. The most critical challenge in controlling the growth of laser‐induced structures below the light diffraction limit is the absence of external order associated to the inherent local interaction due to the self‐organizing nature of the phenomenon. Here high aspect‐ratio nanopatterns driven by near‐field surface coupling and architectured by timely‐controlled polarization pulse shaping are reported. Electromagnetic coupled with hydrodynamic simulations reveal why this unique optical manipulation allows peaks generation by inhomogeneous local absorption sustained by nanoscale convection. The obtained high aspect‐ratio surface nanotopography is expected to prevent bacterial proliferation, and have great potential for catalysis, vacuum to deep UV photonics and sensing.

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Sub-100 nm 2D nanopatterning on a large scale by ultrafast laser energy regulation

Abstract: Coupling ultrafast light irradiation to surface nanoreliefs leads to periodic patterns, achieving record processing scales down to tens of nanometers.

Cited by 24 publications

References 48 publications

Self-Organization Regimes Induced by Ultrafast Laser on Surfaces in the Tens of Nanometer Scales

Self-Organization Regimes Induced by Ultrafast Laser on Surfaces in the Tens of Nanometer Scales

Advances in ultrafast laser structuring of materials at the nanoscale

Boosted Spontaneous Formation of High‐Aspect Ratio Nanopeaks on Ultrafast Laser‐Irradiated Ni Surface

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