SU-8 Lenses: Simple Methods of Fabrication and Application in Optical Interconnection Between Fiber/LED and Microstructures

Nguyen, Minh-Hang; Nguyen, H. Chau; Nguyen, Tuan-Hung; Vu, Xuan-Manh; Lai, Jain-Ren; Tseng, Fan‐Gang; Chen, Te-Chang; Lee, Ming-Chang

doi:10.1007/s11664-016-4408-6

Cited by 9 publications

(3 citation statements)

References 15 publications

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“…31) After the polymer is treated by Ar plasma, polar components such as carboxyl (-COOH), carbonyl (-C=O), amidogen (-NH 2 ), and hydroxyl (-OH) are generated on the surface of the polymer. 32) According to ATR Fourier-Transform Infrared Spectrometer (FT-IR) test results, 33) the amount of hydroxyl is the highest among those polar components. Therefore, hydroxyl is the most important component to increase the bonding strength of the chip.…”

Section: Mechanism Of Our Bonding Methodsmentioning

confidence: 99%

A novel bonding method for large scale poly(methyl methacrylate) micro- and nanofluidic chip fabrication

Qu¹,

Li²,

Yin³

2018

Jpn. J. Appl. Phys.

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Micro- and nanofluidic chips are becoming increasing significance for biological and medical applications. Future advances in micro- and nanofluidics and its utilization in commercial applications depend on the development and fabrication of low cost and high fidelity large scale plastic micro- and nanofluidic chips. However, the majority of the present fabrication methods suffer from a low bonding rate of the chip during thermal bonding process due to air trapping between the substrate and the cover plate. In the present work, a novel bonding technique based on Ar plasma and water treatment was proposed to fully bond the large scale micro- and nanofluidic chips. The influence of Ar plasma parameters on the water contact angle and the effect of bonding conditions on the bonding rate and the bonding strength of the chip were studied. The fluorescence tests demonstrate that the 5 × 5 cm2 poly(methyl methacrylate) chip with 180 nm wide and 180 nm deep nanochannels can be fabricated without any block and leakage by our newly developed method.

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Section: Mechanism Of Our Bonding Methodsmentioning

confidence: 99%

A novel bonding method for large scale poly(methyl methacrylate) micro- and nanofluidic chip fabrication

Qu¹,

Li²,

Yin³

2018

Jpn. J. Appl. Phys.

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“…Young's modulus is determined in uniaxial tension (except for type E and type F, determined in uniaxial unconfined compression), at constant temperature (23.0±0.5 °C) and strain-rate (0.23•10 -2 s -1 ). Young's modulus is obtained plotting the incremental stress as a function of strain, by means of a linear fit: nanoimprint lithography [27] and optical lens [28] and Hexamethylene Diisocyanate-based polymer (type B), in coating applications for industrial purpose [29,30]; Polyethylene-based polymers (type C, type D) are used in medical device [31] and in protective sheet (thin-films) for encapsulates drugs [32]; polysaccharide-based hydrogels are used in regenerative medicine, substitutive biology and tissue engineering, as tissue replacement, support and mimicking [33][34][35].…”

Section: Methodsmentioning

confidence: 99%

Evidences of non-linear short-term stress relaxation in polymers

Schiavi

Prato

2017

Polymer Testing

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“…However, if the UV-bleaching fabrication technique is considered, UV cured polymers are more suitable because the refractive index of which can be easily adjusted through changing the bake temperature and UV exposure dose [28]. Compared with these materials, as a commercially available UV polymer, SU-8 has been widely used in applications of microfluidics [29], lens [30], cantilevers [31], lithography [32], and optical waveguides [33]. For the microdisplacement sensing in this work, the high glass temperature of SU-8 over 200 °C can provide a good tolerance to environment change.…”

Section: Waveguide Materialsmentioning

confidence: 99%

High sensitivity waveguide micro-displacement sensor based on intermodal interference

Gao

et al. 2017

J. Opt.

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An optical waveguide displacement sensor according to core-cladding modes interference is theoretically proposed and experimentally demonstrated. Ultraviolet sensitive SU-8 polymer on silica is used as the guiding layer. It is covered by a 12 nm thick planar gold grating. The air gap sensing head which consists of the waveguide end and the single-mode fiber facet can realize the displacement detection by monitoring the wavelength dip shifting in transmission spectra. Cladding modes propagating in the exposed SU-8 can be effectively excited by the end-fire coupling because of the mode field mismatch between the SU-8 waveguide and lead-in fiber. A sinusoidal pattern transmission spectrum in C-band with the depth of over 14 dB can be observed due to the interference between the core and cladding modes. Peaks in the transmission spectrum vary continuously with the position offset of input fiber facet from the center of waveguide end. Both the sensitivity and the stability of sensing are enhanced by the introduction of nanometric gold gratings. The fabricated displacement sensor exhibits a high sensitivity of 2.3 nm μm−1, promising potentials for micromechanical processing and integrated optics application.

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SU-8 Lenses: Simple Methods of Fabrication and Application in Optical Interconnection Between Fiber/LED and Microstructures

Cited by 9 publications

References 15 publications

A novel bonding method for large scale poly(methyl methacrylate) micro- and nanofluidic chip fabrication

A novel bonding method for large scale poly(methyl methacrylate) micro- and nanofluidic chip fabrication

Evidences of non-linear short-term stress relaxation in polymers

High sensitivity waveguide micro-displacement sensor based on intermodal interference

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