2017
DOI: 10.1063/1.4975026
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SU-8 free-standing microfluidic probes

Abstract: We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer. For characterization of the SU-8 microfluidic probes, two liquid interfaces were designed: a disposable interface with integrated wells and an interface with external liquid reservoirs. The versatility of the fabrication and the release procedures was il… Show more

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Cited by 12 publications
(7 citation statements)
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References 42 publications
(35 reference statements)
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“…Optical lithography-based methods have been extensively used for the fabrication of microfluidic channels. SU-8 is one of the most popular materials in this method as it has high mechanical rigidity, and chemical stability, as well as a defined shape and size [ 68 ]. SU-8 has also been used for the fabrication of masters of in-line micro-valves with different aspect ratios via lithography techniques due to its chemical and thermal stability after polymerization and allows mass production from a single master mold [ 69 ].…”
Section: Polymer and Paper-based Microfluidic Fabrication Methodsmentioning
confidence: 99%
“…Optical lithography-based methods have been extensively used for the fabrication of microfluidic channels. SU-8 is one of the most popular materials in this method as it has high mechanical rigidity, and chemical stability, as well as a defined shape and size [ 68 ]. SU-8 has also been used for the fabrication of masters of in-line micro-valves with different aspect ratios via lithography techniques due to its chemical and thermal stability after polymerization and allows mass production from a single master mold [ 69 ].…”
Section: Polymer and Paper-based Microfluidic Fabrication Methodsmentioning
confidence: 99%
“…polymer and paper. Currently, more organic and inorganic materials have been used in the fabrication of low-cost microfluidics such as elastomers [20], thermal plastics [21], thermoset [22], paper [23] and bio-materials [24]. On choosing the right materials for the low-cost microfluidic device, the following aspects need to be taken into consideration: the general physical properties, material cost, applications, surface wettability requirement, biocompatibility and chemical resistance.…”
Section: Materials For Low-cost Microfluidicsmentioning
confidence: 99%
“…Rigid silicon microelectrode devices with fused capillary catheters or integrated microfluidic channels have demonstrated combined intracortical recording and local drug release during intraoperative studies [ 37 , 38 , 39 , 40 ]. To better match the mechanical properties of the brain, microfluidic neural probes have been fabricated using many different polymers, including parylene, SU-8, and polydimethylsiloxane (PDMS) [ 41 , 42 , 43 , 44 , 45 ]. Despite an abundance of microfluidic neural probe materials and architectures, there are very few reports of such probes being used for drug delivery studies beyond intraoperative experiments at acute time points.…”
Section: Introductionmentioning
confidence: 99%