SU-8 focus control mirrors released by XeF 2 dry etch

Lukes, Sarah J.; Dickensheets, David L.

doi:10.1117/12.877077

Cited by 5 publications

(3 citation statements)

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“…MEMS deformable mirrors are versatile elements for optical focus control [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. Electrostatic-pneumatic actuation of deformable mirrors offers relatively large membrane stroke to increase the optical focus range [16,17].…”

Section: Introductionmentioning

confidence: 99%

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

2014

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MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100 µs.

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Section: Introductionmentioning

confidence: 99%

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

2014

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“…Varifocus lenses have already been demonstrated in microscopy [1–5], ocular adaptive optics [6,7], cameras [8–11], astronomy [6,12,13], optical interconnects [14–16], pulse compression or shaping [17–19], optical data storage [20–23], micromachining [24,25], and optical tweezers [26]. Active optical elements include deformable membrane mirrors [9,27–33], liquid-filled lenses [34–41], and spatial light modulators [42–44]. Microelectromechanical systems (MEMS) comprise the majority of such elements due to relative ease of fabrication.…”

Section: Introductionmentioning

confidence: 99%

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

et al. 2016

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Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physical measurements to characterize recently developed deformable mirrors with respect to the amount of spherical aberration each can impart, and the dependence of that aberration control on the amount of defocus the mirror is providing. We find that a four-zone, 4 mm diameter mirror can generate surface shapes with arbitrary primary, secondary, and tertiary spherical aberration over ranges of ±0.4, ±0.2, and ±0.15 μm, respectively, referred to a non-normalized Zernike polynomial basis. We demonstrate the utility of this mirror for aberration-compensated focusing of a high NA optical system.

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“…Different schemes have been used to shape a mirror including electrostatic, thermal, electromagnetic, pneumatic, piezoelectric, and electro-active polymers. Membrane stroke is limited by the snapdown effect in electrostatically actuated mirrors [9][10][11][12][13][14][15]. Also the electrostatic force is attractive regardless of polarity of the applied voltage so only a concave surface curvature can be achieved.…”

Section: Introductionmentioning

confidence: 99%

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

2013

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A MEMS deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror, while direct electrostatic actuation creates a concave surface. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process and results are presented.

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SU-8 focus control mirrors released by XeF 2 dry etch

Cited by 5 publications

References 0 publications

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

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