SU-8 chevron electrothermal micro-actuator with three-layer structures

Ran, 张然 Zhang; Jinkui, 褚金奎 Chu; Hai-xiang, 王海祥 Wang; Zhao-peng, 陈兆鹏 Chen

doi:10.3788/ope.20122007.1500

Cited by 2 publications

(1 citation statement)

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“…At present, there are a large number of MEMS delaying mechanism research, which are mainly divided into two categories. One category is the delaying mechanism based on electricity [8,9,10,11,12,13,14,15,16], which has high-control precision; Dalian University of Technology in China has studied the v-shaped micro-electric-thermal delaying mechanism based on MEMS technology [8], and the university of Toulouse in France has studied MEMS electro-powder delaying mechanism [9]. The other category is the mechanical delaying mechanism [17]; KAMAN INC. of the United States demonstrated a MEMS mechanical delaying mechanism and its delay action does not require electronic control, and it is free from electromagnetic interference and high reliability, and it is particularly suitable for battlefield use in complex electromagnetic environments.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Fufu

Zhang

et al. 2018

Micromachines

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The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elastic-beam delay mechanism, establishing the force and the parameters of an elastic-beam delay mechanism, deriving the mathematical model according to the rigid dynamic mechanics theory, establishing the finite element model by using Ls-dyna solver of the Ansys software, and carrying out the centrifugal test. Simulation and test results match theoretical results quite well. It is believed that the elastic-beam delaying mechanism is quite effective and useful to slow the speed of the movable part in MEMS devices.

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Section: Introductionmentioning

confidence: 99%

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Fufu

Zhang

et al. 2018

Micromachines

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Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force

Zhao

Huang

Liu³

et al. 2020

Micromachines

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A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The tracking experiments of the tip displacement and gripping force were conducted with a PID controller. It is shown that the standard deviation of tracking error of the tip displacement is less than 0.2 μm and the gripping force is 0.35 mN under a closed-loop control. It would provide some references for realizing high-precision microassembly tasks with the designed microgripper which can control the displacement and gripping force accurately.

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SU-8 chevron electrothermal micro-actuator with three-layer structures

Cited by 2 publications

References 0 publications

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force

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