Studying on Preparation of AZO Thin Films with Sol-Gel Method

Abstract

Al doped ZnO thin films（AZO films） was prepared by sol-gel method. The influence of Parameters of different processes on the crystallization properties, micro-morphology and optical properties of this kind of films were studied, using by X-ray diffractometer, filed emission stereoscan, spectral photometer, hall admeasuring apparatus. The results indicated that the crystallization properties, micro-morphology and optical properties of Al doped ZnO films were best on the condition that the sol density was 0.5mol/L, hat treatment temperature is 600 and there is a 8-layer coating.