Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate

Xu, Liguang; He, Yabai; Li, Kun; Zhou, Hui; Xiong, Yuqing

doi:10.1007/s11801-021-1040-3

Optoelectron. Lett.

2021

DOI: 10.1007/s11801-021-1040-3

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Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate

Liguang Xu¹,

Yabai He²,

Kun Li³

et al.

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Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate

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References 11 publications

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