Study on Thermal MEMS Vacuum Sensors Consisting of a Cantilever-Type Heater and Thermally Coupled Temperature Detectors

Abstract

In order to develop compact, low-cost vacuum sensors, a thermally-conductive type MEMS sensor fabricated using a simple SOI-MEMS technology was studied. The sensor consists of cantilever-type heater and two temperature detectors which are faced to the tip of the heater. The prototype was fabricated and evaluated, resulting in a wide measurement range.