Study on the temperature effect, hysteresis and drift of pH-ISFET devices based on amorphous tungsten oxide

Structural properties and sensing characteristics of Y2O3 sensing membrane for pH-ISFET

“…We found that the hysteresis amounts of the pH 7 → 4 → 7 → 10 → 7 loop were smaller than that of 7 → 10 → 7 → 4 → 7 loop. This experimental result is consistent with the Al 2 O 3 [22], Ta 2 O 5 [23], and WO 3 [21] gate ISFETs. Note that the Y 2 O 3 gate dielectric using a RTA at 800 • C exhibits a smaller hysteresis voltage in pH 7 → 4 → 7 → 10 → 7 loop than other RTA conditions as listed in Table 1.…”

“…It is clear that the acid-side hysteresis was lower than the base-side one. Chiang et al [21] reported that the hysteresis width increases with increasing loop time. The inset of Fig.…”

Study on the sensing characteristics and hysteresis effect of the tin oxide pH electrode

“…This difference results in the hysteresis value lager in alkali than in acid. Finally, the hysteresis values of Al 2 O 3 [2,16], Si 3 N 4 [13], Ta 2 O 5 [13], a-WO 3 [29], AlN [30] and SnO 2 under different loop cycles and measuring time were compared in Table 2. The data indicated that the hysteresis value was larger at longer loop circle and longer measuring time.…”

Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors

“…Although the pH sensing system with ISFET has attracted attention owing to the small sensing area and fast response, previous studies have revealed that temperature, hysteresis, and drift impact the measurement accuracy. (10)(11)(12) Additionally, the photosensing system in optical pH sensors is limited because more precise instrumentation directly alters the costs. Generally, metal oxides are excellent proton-sensitive materials.…”