Study on the Microstructure and Electrical Properties of Pb(Zr_0.53 Ti_0.47)O₃ Thin-Films

Abstract

In the present study a complete analysis of the morphological and electrical properties of PZT layers with composition 53Zr-47Ti is presented. Three different samples composed of 3, 6, and 9 PZT layers were analyzed on a substrate consisting of ZrO2-SiO2-Si structures. The PZT and ZrO2 layers were deposited via Sol-Gel, whereas the SiO2 layer, on every sample, was deposited via PECVD. SEM results showed morphology of very small granules on the 3 layered thin-film samples (12 nm), on the 6 layered thin-film samples a mixture of small and large size (100-300 nm) granule formation was observed, with the 9 layered thin-film samples exhibiting very large granule sizes (bigger than 300 nm). XRD results showed that increasing the number of deposited layers caused an incremental increase on the detected peak intensities, aided in the promotion of the perovskite phase, and diminished the presence of the pyrochlore phase. It was also observed, during electrical measurements, that increasing the number deposited layers directly increased the overall capacitance of the thin-film structure. This effect was attributed primarily to the large amount of perovskite and large size of grains presented on thick samples.

Synthesis of CdS nanocrystals in polymeric films studied by in-situ GID and GISAXS

“…• C using what we call "a fast ramp rate" (a few seconds to insert the samples manually into the preheated furnace), and the use of a PbTiO 3 (PT) nucleation layer between TiO 2 and the PZT-PZN [9,19,20].…”

Fabrication of Relaxer-Based Piezoelectric Energy Harvesters Using a Sacrificial Poly-Si Seeding Layer

“…There are five types of electromechanical transducer: electromagnetic, 7,8 electrostatic, [8][9][10] magnetostrictive, 11 triboelectric, 12 and piezoelectric. 5,8,10,[13][14][15] The ease of integration of piezoelectric transducers into microscale devices make them a good option for energy harvesting applications in silicon-compatible technology. 10 Identification of materials with piezoelectric properties has therefore become of great interest.…”

“…10 Identification of materials with piezoelectric properties has therefore become of great interest. 13,14,16 Evaluation of the piezoelectric properties of thin films for integrated energy-harvesting devices has primarily focused on Pb(Zr,Ti)O 3 , or PZT. 2,17 Recently, bulk relaxor ferroelectrics have also been studied for energy-harvesting applications; these perform substantially better than conventional PZT.…”