Study on the interfacial adhesion property of low-k thin film by the surface acoustic waves with cohesive zone model

Xiao, Xia; Qi, Haiyang; Tao, Ye; Kikkawa, Takamaro

doi:10.1016/j.apsusc.2015.11.225

Cited by 27 publications

(12 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To obtain precise NDT results, it is vital to obtain an accurate SAW dispersion curve. [31][32][33] There are several approaches for determining the dispersion of the phase velocity from the normal displacement. In this study, a slant stack transformation was developed to calculate the phase velocity of SAW, which is rapid and enables the dispersion curve to be revealed with remarkable accuracy.…”

Section: Slant Stack Transformationmentioning

confidence: 99%

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Zhang

Xiao

et al. 2023

Physica Rapid Research Ltrs

Self Cite

View full text Add to dashboard Cite

A facile and rapid method for nondestructive testing (NDT) of the Young's modulus of interconnecting thin films using a broadband surface acoustic wave‐interdigital transducer (SAW‐IDT) is presented herein. A linear periodic SAW‐IDT with 20–125 MHz is designed and fabricated to excite surface acoustic wave (SAW) signals on the samples. By applying burst excitations under different frequencies, the SAW waveforms are picked up by a miniaturized piezoelectric transducer and processed by slant stack transformation. Consequently, the SAW dispersion curves over a wide frequency band are established to match the film parameters. Young's modulus of the 100 and 300 nm thickness of SiO2 films and the 800 and 1500 nm low‐k polyimide (PI) films is characterized. The nanoindentation method, as a control experiment, is also carried out to verify the accuracy of the SAW method, and the test results show that the SAW method can eliminate the effect of the substrate with higher precision. This work shows the advantage of the NDT technique by SAW‐IDT in measuring the Young's modulus of ultrathin films with low cost, controllable frequency range, and high accuracy.

show abstract

Section: Slant Stack Transformationmentioning

confidence: 99%

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Zhang

Xiao

et al. 2023

Physica Rapid Research Ltrs

Self Cite

View full text Add to dashboard Cite

show abstract

“…According to our previous study, the normal dominated bilinear cohesive zone model proposed by Alfano and Crisfield can be applied to characterize the interfacial traction-separation behavior and the fitted parameter s d n max / in the cohesive zone model is an indicator of the interfacial adhesion property where s max represents the maximum normal traction and d n stands for normal interface characteristic length in the cohesive zone model. 15) Further considering that energy of the surface acoustic waves is much lower than the required energy of breaking the film/substrate structure, the interfacial traction-separation law applied in the theoretical calculation is…”

Section: Introductionmentioning

confidence: 99%

“…where u ˆand u are the particle displacements in the film and the substrate, respectively. 15) By fitting the experimental dispersion curve with the theoretical curves, the film interfacial adhesion property can be extracted by the surface acoustic wave technique with the cohesive zone model. 14,15) The CZM-SAW technique combined with the finite element calculation is used to determine the film adhesion criterion for judging the film adhesion quality.…”

Section: Introductionmentioning

confidence: 99%

“…15) By fitting the experimental dispersion curve with the theoretical curves, the film interfacial adhesion property can be extracted by the surface acoustic wave technique with the cohesive zone model. 14,15) The CZM-SAW technique combined with the finite element calculation is used to determine the film adhesion criterion for judging the film adhesion quality. 16) In this study, the influence factors of the adhesion criterion are carefully studied.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Xiao

Kong

2019

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

Film adhesion can be determined by the surface acoustic wave (SAW) technique combined with the cohesive zone model (CZM) nondestructively and quantitatively. Moreover, the CZM-SAW technique can judge the adhesion quality quantitatively by the adhesion criterion. In this study, adhesion criterions of four kinds of different film materials with a wide thickness range from 50 nm to 6000 nm are simulated to study the influence factors of film adhesion criterion determined by the CZM-SAW technique. Studying influence factors of film adhesion criterion is essential for adhesion quality judgment. In addition, the adhesion criterion deviation caused by measurement error is analyzed. Adhesion properties of six film samples are determined by the CZM-SAW technique and are judged by the adhesion criterion with considering measurement errors. This paper exhibits the unique advantage of the CZM-SAW technique, which is a complete method for characterizing the film adhesion.

show abstract

“…This method is fast, simple, and non-destructive. [16][17][18] In addition, the propagation of SAWs is hardly limited by the material. So this method is suitable to determine the film thicknesses of most materials.…”

Section: Introductionmentioning

confidence: 99%

Nondestructive determination of film thickness with laser-induced surface acoustic waves

Xiao¹,

Kong²,

Qi³

et al. 2018

Chinese Phys. B

Self Cite

View full text Add to dashboard Cite

The application of surface acoustic waves (SAWs) for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v( f h) and experimental dispersion curve v( f ) is developed. The method provides a series of thickness values at different frequencies f , and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer's data. The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.

show abstract

Study on the interfacial adhesion property of low-k thin film by the surface acoustic waves with cohesive zone model

Cited by 27 publications

References 31 publications

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Nondestructive determination of film thickness with laser-induced surface acoustic waves

Contact Info

Product

Resources

About