Study on the influence of pendulum convex plate on the partial value of quartz flexible accelerometer

Abstract

The partial value is an essential performance index for assessing the stability of quartz flexible accelerometers. By analyzing the structure of the quartz flexural accelerometer and the impact of the pendulum convex plate, the influence of the convex plate on the partial value of the accelerometer is studied by theoretical derivation and modeling simulation methods. The results show that the barycentric coordinate shifts by approximately 10.7678 × 10-12 µm with the change of the coplanarity of the convex plate, which causes mechanical zero position errors, increases the partial value, and affects the stability of the quartz flexural accelerometer. Therefore, the coplanarity of the convex plate should be maintained at ≤0.3 µm and the partial value should be within the error range of ≤ |±2| mg and provide improvement measures to establish a basis for further improving the stability of the quartz flexible accelerometer.