Study on the Effects of the Machining Parameters on the Fabrication of Nanoscale Pits Using the Dynamic Plowing Lithography Approach

He, Yang; Wang, Jiqiang; Geng, Yanquan; Xue, Binxia; Zhao, Xuesen

doi:10.1109/tnano.2019.2904336

Cited by 9 publications

(12 citation statements)

References 26 publications

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“…Thus, in order to accurately predict the experimental process and quantitative analyze the experimental results, the improvement of algorithm and computing capability is indispensable. Many nanostructures have been achieved on polymer materials using the TBN method [ 95 – 97 ]. In particular, the mechanical machining process of polymer materials based on TBN method keeps the normal load constant so as to guarantee the accuracy of the machined nanostructures [ 98 ].…”

Section: Future Research Directions and Challengesmentioning

confidence: 99%

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Molecular Dynamics Study on Tip-Based Nanomachining: A Review

et al. 2020

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Tip-based nanomachining (TBN) approaches has proven to be a powerful and feasible technique for fabrication of microstructures. The molecular dynamics (MD) simulation has been widely applied in TBN approach to explore the mechanism which could not be fully revealed by experiments. This paper reviews the recent scientific progress in MD simulation of TBN approach. The establishing methods of the simulation model for various materials are first presented. Then, the analysis of the machining mechanism for TBN approach is discussed, including cutting force analysis, the analysis of material removal, and the defects analysis in subsurface. Finally, current shortcomings and future prospects of the TBN method in MD simulations are given. It is hopeful that this review can provide certain reference for the follow-up research.

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Section: Future Research Directions and Challengesmentioning

confidence: 99%

“…Many nanostructures have been achieved on polymer materials using the TBN method [ 95 – 97 ]. In particular, the mechanical machining process of polymer materials based on TBN method keeps the normal load constant so as to guarantee the accuracy of the machined nanostructures [ 98 ].…”

Section: Future Research Directions and Challengesmentioning

confidence: 99%

Molecular Dynamics Study on Tip-Based Nanomachining: A Review

et al. 2020

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“…This method provides an approach to scratch nanopits with a high throughput of 4800–5800 pits per second, as shown in Figure 5. Moreover, in the following study of He et al [83], they found that the mean molecular weight and driving amplitude almost had no effect on nanopits scratched on PMMA thin film. Three kinds of polymer film including PMMA, PC and polystyrene (PS) were used to study the influence of material on the critical value of scratching velocity for the transformation from nanogroove to nanopit.…”

Section: Nanopatterns Fabricated By the Tip-based Nanomachining/namentioning

confidence: 99%

“…In addition, another application proposed by He et al [83] recently has the potential to be used in data storage. As shown in Figure 18, several nanopits arrays were fabricated by DPL method on the surface of the PMMA thin films with various scratching speeds.…”

Section: Applicationsmentioning

confidence: 99%

“…Creating 8-bit American Standard Code for Information Interchange (ASCII) codes by DPL method scratching on PMMA thin-film using different velocities: ( a ) schematic of the nanoscale pits fabrication with various scratching velocity, ( b ), ( c ), ( d ) and ( e ) morphologies and 3D images of fabrication results for arrays of pits on polymethyl methacrylate (PMMA) film surface [83]. …”

Section: Figurementioning

confidence: 99%

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Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

et al. 2019

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As a brand new nanomachining method, the tip-based nanomachining/nanoscratching (TBN) method has exhibited a powerful ability at machining on polymer materials and various structures have been achieved using this approach, ranging from the nanodot, nanogroove/channel, bundle to 2D/3D (three-dimensional) nanostructures. The TBN method is widely used due to its high precision, ease of use and low environmental requirements. First, the theoretical models of machining on polymer materials with a given tip using the TBN method are presented. Second, advances of nanostructures achieved by this method are given, including nanodots/nanodot arrays, a nanogroove/channel, 2D/3D nanostructures and bundles. In particular, a useful approach called the ultrasonic vibration-assisted method introduced to integrate with TBN method to reduce the wear of the tip is also reviewed, respectively. Third, the typical applications of the TBN method and the nanostructures achieved by it are summarized in detail. Finally, the existing shortcomings and future prospects of the TBN method are given. It is confirmed that this review will be helpful in learning about this method and push the technology toward industrialization.

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Tip-Based Nanomachining on Thin Films: A Mini Review

Chang

Geng

2021

Nanomanuf Metrol

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As one of the most widely used nanofabrication methods, the atomic force microscopy (AFM) tip-based nanomachining technique offers important advantages, including nanoscale manipulation accuracy, low maintenance cost, and flexible experimental operation. This technique has been applied to one-, two-, and even three-dimensional nanomachining patterns on thin films made of polymers, metals, and two-dimensional materials. These structures are widely used in the fields of nanooptics, nanoelectronics, data storage, super lubrication, and so forth. Moreover, they are believed to have a wide application in other fields, and their possible industrialization may be realized in the future. In this work, the current state of the research into the use of the AFM tip-based nanomachining method in thin-film machining is presented. First, the state of the structures machined on thin films is reviewed according to the type of thin-film materials (i.e., polymers, metals, and two-dimensional materials). Second, the related applications of tip-based nanomachining to film machining are presented. Finally, the current situation of this area and its potential development direction are discussed. This review is expected to enrich the understanding of the research status of the use of the tip-based nanomachining method in thin-film machining and ultimately broaden its application.

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Study on the Effects of the Machining Parameters on the Fabrication of Nanoscale Pits Using the Dynamic Plowing Lithography Approach

Cited by 9 publications

References 26 publications

Molecular Dynamics Study on Tip-Based Nanomachining: A Review

Molecular Dynamics Study on Tip-Based Nanomachining: A Review

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

Tip-Based Nanomachining on Thin Films: A Mini Review

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