Study on the destructive measurement of subsurface damage for fused silica mirror

Jin, Yuzhu; Jiao, L. X.; Zhu, Yongwei; Tong, Yi

doi:10.1117/12.2506680

Cited by 1 publication

(1 citation statement)

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“…The current detection methods for SSD in quartz glass are mainly divided into destructive methods and non-destructive methods. In destructive methods, SSD is exposed and then the SSD information is obtained by microscopic observation (Jin et al, 2019). The common methods of destructive detection include cross-sectional microscopy (Esmaeilzare et al, 2014), angular polishing (Guo et al, 2005), HF chemical etching (Zhu et al, 2017), and the combination technology of TEM and FIB (Li et al, 2019;Li et al, 2022).…”

Section: Introductionmentioning

confidence: 99%

Polarized laser scattering detection of subsurface damage of quartz glass induced by grinding

Shi

Qiao

et al. 2023

Front. Mater.

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Subsurface damage (SSD) is inevitably generated during the grinding process of quartz glass. It has a great impact on sustainability, lifetime and optical performance of quartz glass components and systems. This paper proposes a non-destructive detection method for detecting SSD in ground quartz glass based on polarized laser scattering (PLS). A PLS system was built to detect SSD in ground quartz glass samples prepared with different abrasive particle sizes. The PLS detection signal value had a positive correlation with the SSD depth. The finite-difference time-domain (FDTD) method was used to simulate the laser scattering process at the SSD. The distribution of electric field intensity could reflect the location of SSD. It is concluded that the PLS system can effectively detect SSD in the ground quartz glass.

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