Study on the correlation between dielectric constant and chemical shift in FTIR spectra of SiOC film by chemical vapor deposition after annealing

Abstract

SiOC films made by the inductively coupled plasma chemical vapor deposition were researched the relationship between the dielectric constant and the chemical shift. SiOC film had the main Si‐O‐C bond with the molecule vibration mode in the range of 930∼1230 cm‐1 which consists of C‐O and Si‐O bonds related to the cross link formation according to the dissociation and recombination. The C‐O bond originated from the elongation effect by the neighboring highly electronegative oxygen atoms at terminal C‐H bond in Si‐CH3 of 1270 cm‐1. However, the Si‐O bond was formed from the second ionic sites recombined after the dissociation of Si‐CH3 of 1270 cm‐1. Increment of Si‐O bond in the Si‐O‐C main bond contributed to increase the hardness and decrease the roughness because of the decreasing of the carbon content witch is related to the space effect. The dielectric constant of SiOC film was decreased by lowering the polarization which consists of the ionic and electronic polarity. Increment of Si‐O bond in a right shoulder at the main bond was interpreted by the red shift observed in FTIR spectra. Moreover, the increment of Si‐O bond and decrement of carbon content induced to decrease the ionic polarity and then decreased the dielectric constant. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Supercapacitive properties of porous carbon nanofibers via the electrospinning of metal alkoxide-graphene in polyacrylonitrile

“…2(a). Three main features are observed in agreement with the literature: (i) in case of TGP-3, and TGP-5, the main bond of Si-O-C in the range of 930$ 1215 cm À 1 is composed of the C-O bond and Si-O cross-link bond compared with CNFs [32]. (ii) the band at 1600 cm À 1 is attributed to the CQC vibrations and (iii) the broad band at ca.…”

Modification of the wood‐plastic composite for enhancement of formaldehyde clearance and the 3D printing application

“…The mechanism (Figure 2) is that the hydroxyl groups on cellulose are activated by acid, which attacks the silylethoxyl group on APTES, and then eliminates a molecule of ethanol to form COSi ether bond, so as to obtain the modified cellulose composite APTES@cellu/P. The new absorption band near 1150 cm −1 in FTIR spectrum can be attributed to the asymmetric stretching vibration of COSi bond 23 . Furthermore, compared with cellu/P material, the absorption band of APTES@Cellu/P modified material near 3480 cm −1 can be attributed to the stretching vibration of primary amine NH bond, 24 and its broad band covers the characteristic band of hydroxyl group in this region.…”