Study on Structure and Optimization of Hybrid Silica Particles on Chemical Mechanical Polishing of Sapphire

Bun-Athuek, Natthaphon; Takazaki, Hiroko; Yasunaga, Takuo; Yoshimoto, Yutaka; Khajornrungruang, Panart; Suzuki, Keisuke

doi:10.3850/978-981-11-2728-1_20

WCMNM 2018 World Congress on Micro and Nano Manufacturing 2018

DOI: 10.3850/978-981-11-2728-1_20

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Study on Structure and Optimization of Hybrid Silica Particles on Chemical Mechanical Polishing of Sapphire

Natthaphon Bun-Athuek¹,

Hiroko Takazaki²,

Takuo Yasunaga³

et al.

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Study on Structure and Optimization of Hybrid Silica Particles on Chemical Mechanical Polishing of Sapphire

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