2005
DOI: 10.1002/pen.20322
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Study on squeezing flow during nonisothermal embossing of polymer microstructures

Abstract: A numerical simulation of the hot embossing process with nonisothermal embossing conditions was carried out to observe the flow pattern of poly (methyl methacrylate) into microcavities. The microcavity was isomorphically downsized. The ratio of the cavity width over the cavity thickness was maintained constant at 8:1 throughout the analysis, while the cavity thickness varied from 200 m to 0.5 m. It was found that as the microcavity was downsized, the filling mechanism varied. For larger cavity thicknesses (e.g… Show more

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Cited by 49 publications
(36 citation statements)
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“…Thus chips were considered as the isotropic elastic body. The material properties of PMMA are shown in Table 3 ( Yao et al 2005).…”
Section: Materials Propertiesmentioning
confidence: 99%
“…Thus chips were considered as the isotropic elastic body. The material properties of PMMA are shown in Table 3 ( Yao et al 2005).…”
Section: Materials Propertiesmentioning
confidence: 99%
“…For other hot embossing applications, such as micro lenses and micro fluidics, the residual stress is undesirable as it affects the optical properties and the surface finish, both of which are not a major concern for piezocomposite moulds. Furthermore, it is known that wall climbing flow in non isothermal hot embossing can result in weld lines (Yao et al 2005) that act as points of weakness in the embossing. The single use nature of the moulds means that this weakness is not a major concern either, provided that the ceramic dough does not penetrate between the cracks.…”
Section: The Suitability Of Hot Embossingmentioning
confidence: 99%
“…The difference in the maximum and minimum heights of the replicated pattern was 1.1 µm and the max height was shown at the central area of the replicated pattern. 11 As well as the central area of the replicated pattern, it is very important to observe the outer area in order to investigate the flow direction and characteristics of the polymer according to the pattern shape and forming condition during hot embossing. AFM was used to observe the profile of the crosssection of the replicated sample at the central area (1) of sample 1 of positions (1), (8), and (9).…”
Section: Polymethylmethacrylate(pmma)mentioning
confidence: 99%