Study on purification and application of novel precipitant for ceria-based polishing powder

Liu, Hongji; Feng, Zongyu; Huang, Xiaowei; Long, Zhiqi; Wang, Meng; Xiao, Yanfei; Hou, Yongke

doi:10.1016/s1002-0721(12)60254-3

Cited by 14 publications

(3 citation statements)

References 2 publications

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“…Currently, the commonly used preparation method of ceria-based abrasives mainly includes three processes, which are precipitation, fluorination, and calcination [ 14 , 15 , 16 ]. However, high-precision classification is adopted to reasonably control the size of ceria-based abrasives [ 17 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

The Effects of Precursors on the Morphology and Chemical Mechanical Polishing Performance of Ceria-Based Abrasives

et al. 2022

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Ceria-based abrasives are widely used in precision chemical mechanical polishing (CMP) fields, such as thin film transistor liquid crystal display (TFT-LCD) glass substrates and integrated circuits, because of their excellent physicochemical properties. Rare earth carbonates, as precursors of ceria-based abrasives, directly affect the morphology of ceria-based abrasives, which, in turn, affects the material removal rate (MRR) and the surface roughness (Ra) after polishing. Herein, rare earth carbonates with different morphologies were obtained by adjusting reaction parameters during precipitation, including flake, spindle, and spheroid. Moreover, the phase of precursors was analyzed, and the evolution process of morphology from precursors to ceria-based abrasives was investigated. Furthermore, the effect of precursors on the polishing performance of ceria-based abrasives was explored. The results show that the primary particles of ceria-based abrasives are near-spherical, but the morphology and dispersion of the secondary particles are obviously inherited from precursors. Among them, near-spherical ceria-based abrasives prepared by nearly monodisperse near-spherical precursors show better uniformity and higher dispersion, and they not only achieve the lowest Ra but also obtain a higher MRR of 555 nm/min (9 wt.%) for polishing TFT-LCD glass substrates. The result is significant for the further optimization and application of high-performance ceria-based abrasives.

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Section: Introductionmentioning

confidence: 99%

The Effects of Precursors on the Morphology and Chemical Mechanical Polishing Performance of Ceria-Based Abrasives

et al. 2022

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“…[1][2][3][4] It is widely used as various silica-containing glass materials because of their unique mechanical and chemical polishing performance. [5][6][7][8] Usually, the cutting efficiency of pure CeO 2 is lower than that of ceria-based compounds added with La. [9][10][11] With the development of the precision optics industry and the emergence of new applications, the requirements for a neat nish of the glass surfaces are getting more stringent.…”

Section: Introductionmentioning

confidence: 99%

Evolution of the phases and the polishing performance of ceria-based compounds synthesized by a facile calcination method

et al. 2019

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“…At present it has been widely used in chemicalmachine polishing(CMP),catalysts,ultravioletblocker, opticaldevices, ceramic, fuel cells and so on. Because of itsexcellent cutting ability, short polishing time, high polishingprecision, clean operating environment, and better effect compared with the other polishing powders [1,2], cerium oxideis especially considered candidate in the field of CMP.…”

Section: Introductionmentioning

confidence: 99%

Preparation of Cerium-rich Rare Earth Oxide Nanoparticles from Bastnaesite Concentrate

Liu¹,

Zhang²,

Qiu³

et al. 2016

Proceedings of the 2015 2nd International Conference on Machinery, Materials Engineering, Chemical Engineering and Biotechnolog

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Cerium-rich rare earth oxides nanoparticles were extracted from bastnaesite concentrate by first leaching, alkali fusion with NaOH, and second leaching process. The effects of the hydrochloric acid concentration, mass ratio of solid to liquid, leaching temperature of the leaching process，and the NaOH amount, roasting temperature and roasting time of alkali fusion process were systematically studied by X-ray fluorescence spectrometry (XRF), X-ray diffraction (XRD) and transmission electron microscope (TEM) analysis. The optimum parameters of the leaching process were 2 molL-1 HCl solution, solid to liquid mass ratio 1: 5 and 75 o C, respectively. Nonrare earth impurities could be effectively removed by roasting the first sludge with 30wt. % NaOH. The grade of total rare earth oxides and the purity of CeO 2 in the final product were 96.99% and 78.73%, respectively, which were improved by 10.62% and 5.73% than that of one step leaching. The cerium-rich rare earth oxides powder showed a major phase of ceria, with particle size distribution of 20~100nm according to TEM.

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Study on purification and application of novel precipitant for ceria-based polishing powder

Cited by 14 publications

References 2 publications

The Effects of Precursors on the Morphology and Chemical Mechanical Polishing Performance of Ceria-Based Abrasives

The Effects of Precursors on the Morphology and Chemical Mechanical Polishing Performance of Ceria-Based Abrasives

Evolution of the phases and the polishing performance of ceria-based compounds synthesized by a facile calcination method

Preparation of Cerium-rich Rare Earth Oxide Nanoparticles from Bastnaesite Concentrate

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