2005
DOI: 10.2494/photopolymer.18.543
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Study on Polymer Materials Evaluation System for Nano-Imprint Lithography

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Cited by 13 publications
(10 citation statements)
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“…A UV-curable acrylic resin (PAK-01) was the dripped over a quartz substrate [11] and the PDMS mold pressed onto the resin from above. This process was performed using the LTNIP-5000 nanoimprint equipment [12], with stamping pressure set to 1.5 MPa. Once the PAK-01 completely filled the mold, the resin was exposed to UV light to cure (wavelength and illuminance of 365 nm and 10 mW/cm 2 , respectively).…”
Section: Experimental 31 Patterning By Nanocasting and Nanoimprintimentioning
confidence: 99%
“…A UV-curable acrylic resin (PAK-01) was the dripped over a quartz substrate [11] and the PDMS mold pressed onto the resin from above. This process was performed using the LTNIP-5000 nanoimprint equipment [12], with stamping pressure set to 1.5 MPa. Once the PAK-01 completely filled the mold, the resin was exposed to UV light to cure (wavelength and illuminance of 365 nm and 10 mW/cm 2 , respectively).…”
Section: Experimental 31 Patterning By Nanocasting and Nanoimprintimentioning
confidence: 99%
“…The nanoimprinting device used here is the LTNIP-5000 manufactured by Litho Tech Japan Corporation [14]. The stamping pressure was 1,000 N, the illuminance of UV light (365-436 nm) 7 mW/cm 2 , and exposure time 5 minutes.…”
Section: Producing Antifouling Sheets For Stentsmentioning
confidence: 99%
“…The Si mold is pressed to the resin layer, and the resin is cured by UV irradiation. The nanoimprint machine LTNIP-5000 [12] (Lithotec Japan Co., Ltd.) was used. In nanoimprint process, the pressing pressure was 1000 N, the UV-light (365 nm ~ 436 nm) intensity was 30 mW/cm 2 , and the exposure time was 5 minutes.…”
Section: Oil Repellent Sheetmentioning
confidence: 99%