Study on Polishing Technology for Hard-Brittle Materials by a Micro Abrasive Water Jet

Abstract

s: Abrasive jet micromachining is considered as a promising precision processing technology for brittle materials such as silicate glass and silicon nitride that are increasingly used in various applications. In this study, some polishing experiments are conducted for hard-brittle materials by a micro slurry jet. The results show that the morphology and the integrity of the material surface are improved greatly after polishing. The average roughness (Ra) value of the silicate glass decrease from 2.32μm to 0.35μm and the average roughness (Ra) value of the Si3N4 decrease from 2.63μm to 0.34μm. The material removal mechanism and the surface formation mechanism are studied. The factors to influence the surface morphology, the surface quality and the surface roughness are analyzed in order to take measures to improve the surface quality and reduce the surface roughness value.

Experimental Study on Dispersion Stability and Polishing Performance of Polishing Solution Based on Micro-Abrasive Water Jet Polishing

“…Zhu et al [10] observed a substantial enhancement in the surface accuracy of workpiece materials through the use of abrasive water jet technology for polishing brittle and hard materials. Liu et al [11] conducted jet polishing experiments on hard and brittle materials, achieving a successful reduction in the surface roughness of silicate glass from 2.32 µm to 0.35 µm and silicon nitride material from 2.63 µm to 0.34 µm. Anbarasu et al [12] introduced the concept of multi-stage polishing and investigated the impact of various parameter combinations on the surface roughness of BK7 optical glass through experiments.…”

Apparatus Developments of Ultrasonic Vibration‐Assisted Microabrasive Waterjet Polishing

“…However, AWJ as a cold-working process has certain unique advantages, such as no heat deformation, less machining force exertion, and friendly environment [9,10]. Also, entrained with abrasive particles, AWJ is able to machine a variety of materials ranging from soft to hard materials [11]. Because of very low machining efficiency of AWJ, there are a wide range of parameters needed to be optimized such as system pressure, abrasive flow rate, distance of the standoff, moving velocity, etc [12,13].…”

Experimental Study of the Ultrasonic Vibration‐Assisted Abrasive Waterjet Micromachining the Quartz Glass

“…e quartz glass is widely used in many fields such as military, aeronautics, medical, measurement instruction, and the light industry [1,2] Because it is a typical brittle and hardto-machine material, the conventional machining process cannot be successfully applied in the glass product production, while abrasive waterjet (AWJ) technology has a great advantage in the production of the glass products, because it has no heat deformation, high machining efficiency, and high accuracy, especially in the glass micromachining process [3][4][5]. In order to increase the efficiency of the abrasive waterjet machining glass, the pulsed waterjet has been a research issue, for the reason that it could obtain a greater removal of target material by generating water-hammer effect, for example, Vijay et al [6], Chahine et al [7], and Ghadi et al [8] have introduced a kind of pulsed waterjet using an ultrasonic vibration on the nozzle, the jet's energy is pretty low, and the amount of material removal is increased greatly.…”