2019
DOI: 10.1016/j.measurement.2018.12.008
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Study on optimization of ultrasonic-vibration-assisted polishing process parameters

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Cited by 19 publications
(1 citation statement)
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“…It is found that the effect of ultrasonic vibration on the particle trajectories and the resultant particle dynamic impact process in the stagnation zone significantly contributes to the performance enhancement of micro-hole, including the material removal rate and bottom surface morphology, rather than its effect on inducing the additional brittle erosion due to the less increase of particle impact energy. According to Yu et al, 8 axial ultrasonic vibration assisted polishing method was employed to improve polishing efficiency of SiO 2 glass, an orthogonal experiment method was adopted to research the effects of five key process parameters. Zhang et al, 9 focused on predicting the generated local surface profile and providing a theoretical basis to reduce this error by controlling the polishing parameters.…”
Section: Introductionmentioning
confidence: 99%
“…It is found that the effect of ultrasonic vibration on the particle trajectories and the resultant particle dynamic impact process in the stagnation zone significantly contributes to the performance enhancement of micro-hole, including the material removal rate and bottom surface morphology, rather than its effect on inducing the additional brittle erosion due to the less increase of particle impact energy. According to Yu et al, 8 axial ultrasonic vibration assisted polishing method was employed to improve polishing efficiency of SiO 2 glass, an orthogonal experiment method was adopted to research the effects of five key process parameters. Zhang et al, 9 focused on predicting the generated local surface profile and providing a theoretical basis to reduce this error by controlling the polishing parameters.…”
Section: Introductionmentioning
confidence: 99%