Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

Chen, Tao; Pan, An; Li, Cunxia; Si, Jinhai; Hou, Xun

doi:10.1016/j.apsusc.2014.11.012

Cited by 19 publications

(4 citation statements)

References 33 publications

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“…Ultrafast laser micromachining has recently attracted growing attention for the fabrication of microgrooves with the virtue of low material selectivity and environment friendliness. [10][11][12] The researchers try to investigate techniques to control the crosssection of microgroove by ultrafast laser. For example, the Vshape and U-shape microgroove can be achieved by varying the laser focal plane.…”

Section: Introductionmentioning

confidence: 99%

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

Qiu

Guo

Huang

et al. 2023

Adv Materials Technologies

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Fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials is significantly valuable but still challenging. Herein, a patterned laser‐induced microjet‐assisted ablation method for cross‐sectional profiles controllable laser micromachining is proposed. During the liquid‐assisted laser ablation process, debris and bubbles that may disturb the laser energy deposition can be instantaneously expelled by a directional laser‐induced microjet. The Gaussian laser spot is spatially modulated into specific geometric shapes, such as triangles, to tune locally deposited laser energy to carve microgrooves with designed cross‐sections. To achieve customized microgrooves efficiently, a reliable geometrical model based on the ablation threshold theory is developed to guide the processing parameter selection, including the laser spot shape, polarization, pulse energy, and scanning strategies. The simulation and experimental results confirm that this method achieves the decoupled control of the groove depth and width in a single‐path laser ablation process. Using this method, the design and manufacturing of microgrooves with controllable cross‐sections on single crystalline silicon carbide are demonstrated. The patterned laser‐induced microjet‐assisted ablation method provides a new route for fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials.

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Section: Introductionmentioning

confidence: 99%

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

Qiu

Guo

Huang

et al. 2023

Adv Materials Technologies

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“…Kai Yin et al [15] investigated the influences of pulse energy and scanning speed on the groove depth and removal area of microgrooves to fabricate microgrooves in PMMA by femtosecond laser irradiation assisted with a micro torch. Chen Tao et al [16] studied the morphologies of high-aspect-ratio silicon grooves fabricated by using femtosecond laser irradiation and selective chemical etching of hydrofluoric acid (HF). Manickam et al [17] investigated the interaction of laser and crystalline germanium (Ge) <100> and the influence of processing parameters on the groove dimensions and surface roughness using ultrafast laser pulses under ambient conditions.…”

Section: Introductionmentioning

confidence: 99%

Process Research on the Microgroove Depth Uniformity of Bursting Discs Using Femtosecond Lasers

Jiang

Xie

2022

Coatings

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This study proposes an ultrafast laser ablation method for improving the depth uniformity of microgrooves in bursting discs. Under a lower laser fluence, the influence of the spot overlap rate on the depth uniformity of microgrooves was studied. The results show that 80% of the spot overlap ratio has good performance in ablation efficiency and depth uniformity of microgrooves. On this basis, the relationship between the number of laser scanning layers and the depth of microgrooves was studied, and the number of scanning layers needed to ablate 70 µm microgrooves was obtained. Based on the combination of the process parameters and the optimization of the laser scanning path, laser ablation of bursting disc microgrooves with a specific shape was realized. The depth uniformity of microgrooves in different sections of the bursting disc was not worse than 4 µm. The preliminary bursting test shows that the bursting pressure between the discs was no more than 0.06 Mpa. Compared with the results of the traditional processing method, the microgroove depth uniformity of bursting discs was greatly improved. Therefore, femtosecond laser ablation technology provides an advanced manufacturing method for bursting disc microgroove machining.

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“…The influence of numerical aperture, laser power and scanning speed on the aspect ratio is studied and the maximum aspect ratio is 40. Chen et al (2015) studied morphologies of HAR silicon grooves fabricated by using FS laser irradiation and selective chemical etching of hydrofluoric acid to remove laser-induced structure change regions. The bottom of the microgroove is more difficult to be etched due to the introduction of less oxygen.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of high-aspect-ratio grooves with high surface quality by using femtosecond laser

Zhang

Huang

Wang

et al. 2021

ILT

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Purpose The purpose of this study is to fabricate high-aspect-ratio grooves with high surface quality by femtosecond laser (FS) to improve the machinability of silicon carbide (SiC) and optimize the process parameters in micromechanical applications. Design/methodology/approach Four contrast experiments are reported to characterize the FS laser grooving process for SiC with polarization direction, crystal orientation, multi-pass scanning and z layer feed, respectively. The effects of different experimental conditions on the groove characteristics, material removal rate (MRR), aspect ratio, heat affected zone (HAZ) and surface roughness Ra are analyzed. Findings The influence of increasing laser fluence and multi-scanning pass on the groove depth is greater than on the groove width. The MRR, aspect ratio, HAZ and Ra increased with the increase of laser fluence and multi-scanning pass. The direction of laser polarization affects the direction of hot electron injection but has little effect on the material characteristics. FS laser ablation is an isotropic process and there is no obvious change in different crystal orientations. The z-layer feed can significantly increase the groove width and depth and reduce HAZ and Ra. The maximum aspect ratio of 82.67% was fabricated. Originality/value The results contribute to the understanding of the removal mechanism and reduce the friction of the microfluidic device and improve the flowability in the FS laser ablation of SiC. This paper provides suggestions for the selection of suitable process parameters and provides a wider possibility for the application of micro-texture on SiC.

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Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

Cited by 19 publications

References 33 publications

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

Process Research on the Microgroove Depth Uniformity of Bursting Discs Using Femtosecond Lasers

Fabrication of high-aspect-ratio grooves with high surface quality by using femtosecond laser

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