Study on Microstructure and Tribological Mechanism of Mo Incorporated (AlCrTiZr)N High-Entropy Ceramics Coatings Prepared by Magnetron Sputtering
Jia Zheng,
Yiman Zhao,
Jingchuan Li
et al.
Abstract:(AlCrTiZrMox)N coatings with varying Mo content were successfully prepared using a multi-target co-deposition magnetron sputtering system. The results reveal that the Mo content significantly affects the microstructure, hardness, fracture toughness, and tribological behavior of the coatings. As the Mo content in the coatings increases gradually, the preferred orientation changes from (200) to (111). The coatings consistently exhibit a distinct columnar structure. Additionally, the hardness of the coatings incr… Show more
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