Study on Microstructure and Properties of Zr-Si-N Films with Different Nitrogen Partial Pressures

Abstract

Zr-SiN films were prepared by radio frequency powered reactive magnetron sputtering at different N2 partial pressures. The influences of N2 partial pressure on the microstructure and properties of Zr-SiN films were studied. The results reveal that the Zr/Si ratio decreases and the sheet resistance increases as the N2 partial pressure increases. The microstructures of Zr-SiN films are composed of nano-crystallite ZrN embedded into amorphous matrix of SiNx phase and a small quantity of Zr2Si produced at low N2 partial pressure. The appearance of Zr2Si phase is related to the low nitridation level. The microhardness of Zr-SiN film decreases with the increase of N2 partial pressure at the N2 partial pressure of 0.03 Pa, the microhardness of Zr-SiN films is possessed of maximum value of about 22.5 GPa. The phenomenon that high N2 partial pressure results in low microhardness in Zr-SiN films may be related to the lattice distortion induced by the addition of Si.

Silicon influence on corrosion resistance of magnetron sputtered ZrN and ZrSiN thin films

“…Currently, researchers have studied the synthesis and characterisation of Zr-Si-N coatings [21][22][23]. Most of their works have focus on microstructure and mechanical property studies.…”

Effect of Melting Process on Zr Content and Grain Refinement in ZE41A Alloy

“…This exceptional grain-refining ability of Zr has led to the development of a number of commercially important sand casting creep-resistant alloys [5]. This is because in the fully grain-refined state the microstructure of Mg-Re alloy is such that a hard intermetallic phase exists both at triple points and along the grain boundaries which help lock the grain boundaries and reduce grain boundaries sliding [6]. Emley pointed out that creep resistant Mg-Re or Mg-Re-Zn alloys were of little practical interest as sand casting alloys unless zirconium was added as a grain refiner [1].…”