Very-deep nanometer-size domain inversions in lithium niobate (LiNbO 3 ) substrate have been realized using circular form full cover electrode (CF-FCE). From the calculated results, circular form electrode is better than that of rectangular type for fine domain inversion patterns. Domain inversion was performed by applying high voltage to CF-FCE. Using the proposed CF-FCE, we successfully fabricated 2 mm periodic domain inversion in a 500-mm-thick congruent LiNbO 3 (C-LN) crystal. It is also shown that smaller domain inversion width in the nanometer regime with high aspect ratio is possible using this technique. We obtained an aspect ratio as high as 870 for a domain inversion width of 575 nm. To our knowledge, such a high aspect ratio is reported for the first time.