Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure

Wang, Ruiyang; Li, Dahai; Xu, Kun; Tang, Lei; Chen, Pengyu

doi:10.1117/12.2506462

Cited by 4 publications

(1 citation statement)

References 9 publications

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“…The fourth is to separate the phase from the front and rear surfaces [ 13 ]. Without special equipment, high precision detection is obtained through the combination of a spectral estimation algorithm and projected multi-frequency fringes [ 14 ]. However, the fringe image projection of up to 2000 frames not only increases the projection time, but also requires Fourier transformation on all pixels point by point, which greatly increases the detection time.…”

Section: Introductionmentioning

confidence: 99%

Phase Deflectometry for Defect Detection of High Reflection Objects

Cheng

Wang

Zhu

et al. 2023

Sensors

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A method for detecting the surface defects of high reflection objects using phase deflection is proposed. The abrupt change in the surface gradient at the defect leads to the change in the fringe phase. Therefore, Gray code combined with a four-step phase-shift method was employed to obtain the surface gradients to characterize the defects. Then, through the double surface illumination model, the relationship between illumination intensity and phase was established. The causes of periodic error interference were analyzed, and the method of adjusting the fringe width to eliminate it was proposed. Finally, experimental results showed the effectiveness of the proposed method.

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Section: Introductionmentioning

confidence: 99%

Phase Deflectometry for Defect Detection of High Reflection Objects

Cheng

Wang

Zhu

et al. 2023

Sensors

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A Single-Pixel Imaging Based Stereo Deflectometry for 3D Reconstruction of Free-Form Transparent Objects With Parasitic Reflections

Huang,

Jiao,

Miao

et al. 2023

IEEE Trans. Comput. Imaging

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Simultaneous multisurface measurement of freeform refractive optics based on computer-aided deflectometry

Wang

et al. 2020

Optica

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Freeform optics, due to the more general surface geometry that offers high degrees of design freedom to control light propagation, has already been widely used in both nonimaging optics and imaging optics. With the recent advances in design and fabrication of freeform optics, one of the remaining challenges is how to accurately measure freeform optical surfaces, especially those included in freeform refractive optics. To meet this imperative need, for the first time, we believe, present an effective simultaneous multisurface measurement method for freeform refractive optics. Instead of using a reflected optical field to reconstruct tested optical surfaces, we develop a surface reconstruction method based on a transmitted field to tackle the challenges caused by the low reflectivity and compound effect of multiple reflection of refractive surfaces. The transmitted fields from refractive elements are measured by computer-aided deflectometry in order to achieve a large measurement dynamic range and high accuracy. Using the transmitted fields, a multisurface reconstruction model based on iterative optimization is then employed to achieve the accurate multisurface measurement simultaneously. The proposed method is demonstrated to be very effective and robust in testing freeform refractive optics, with a future potential for in situ metrology.

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Study on eliminating the effect of parasitic reflection on deflectometry measurement of planar optical element surface figure

Cited by 4 publications

References 9 publications

Phase Deflectometry for Defect Detection of High Reflection Objects

Phase Deflectometry for Defect Detection of High Reflection Objects

A Single-Pixel Imaging Based Stereo Deflectometry for 3D Reconstruction of Free-Form Transparent Objects With Parasitic Reflections

Simultaneous multisurface measurement of freeform refractive optics based on computer-aided deflectometry

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