Study on Electrical Performances of ZnO-TFTs with 3-D Finlike Channels Fabricated by Nanoimprint Lithography and Atomic Layer Deposition

Chen, H.J.H.; Yeh, Bao-Sung; Chiang, Chen-Ting; Lee, T.N.; Hsieh, K.C.

doi:10.7567/ssdm.2015.ps-6-20

Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials 2015

DOI: 10.7567/ssdm.2015.ps-6-20

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Study on Electrical Performances of ZnO-TFTs with 3-D Finlike Channels Fabricated by Nanoimprint Lithography and Atomic Layer Deposition

H.J.H. Chen¹,

Bao-Sung Yeh²,

Chen-Ting Chiang³

et al.

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Study on Electrical Performances of ZnO-TFTs with 3-D Finlike Channels Fabricated by Nanoimprint Lithography and Atomic Layer Deposition

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