2024 Conference of Science and Technology for Integrated Circuits (CSTIC) 2024
DOI: 10.1109/cstic61820.2024.10531997
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Study of Tungsten-Doped Carbon Hard Mask Etch Process Using NF3/O2 Based Chemistry

Li-Tian Xu,
Li Zeng,
Meng-Jiao Zhu
et al.
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