“…The 3D reconstruction methods of surface topography, necessary to obtain roughness parameters, can be divided into two principal categories: 1) Stereoscopy, in which a SEM image stereo pair is used. The stereo pair can be obtained by deflecting the electron beam, but it is generally implemented by tilting the specimen stage (Lane, 1969(Lane, , 1972Stampfl et al, 1996;Davies and Randle, 2001;Huang et al, 2004;Bonetto et al, 2006;Ponz et al, 2006;Jahnisch and Fatikow, 2007;Marinello et al, 2008;Ostadi et al, 2009;Malboubi et al,2009;Fatikow et al, 2009;Azevedo and Marques, 2010;Chen et al, 2010;Ostadi et al, 2010). Both, observation of 3D images and measurement of 3D height data are possible.…”