Study of the three-dimensional shape measurement for mask patterns using Multiple Detector CD-SEM

Yonekura, Isao; Hakii, Hidemitsu; Kawashita, Masashi; Nishiyama, Yasushi; Tanaka, Keishi; Kikuchi, Yasutaka; Murakawa, Tsutomu; Shida, Soichi; Kuribara, Masayuki; Iwai, Toshimichi; Matsumoto, Jun; Nakamura, Takayuki

doi:10.1117/12.879400

SPIE Proceedings

2011

DOI: 10.1117/12.879400

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Study of the three-dimensional shape measurement for mask patterns using Multiple Detector CD-SEM

Isao Yonekura

Hidemitsu Hakii

Masashi Kawashita

et al.

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Study of the three-dimensional shape measurement for mask patterns using Multiple Detector CD-SEM

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