Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method

Hui, 乔辉 Qiao; Xintian, 陈心恬 Chen; Shuiping, 赵水平 Zhao; Tianyi, 兰添翼 Lan; Nili, 王妮丽 Wang; Longyuan, 朱龙源 Zhu; Xiangyang, 李向阳 Li

doi:10.3788/irla201645.1204001

红外与激光工程

2016

DOI: 10.3788/irla201645.1204001

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Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method

乔辉 Qiao Hui¹,

陈心恬 Chen Xintian²,

赵水平 Zhao Shuiping³

et al.

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Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method

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