Study of the structure of SiAlON obtained by synthesis with low-temperature plasma energy

Abstract

This article presents the results of studies of the effect of low-temperature plasma on a sample prepared from powders Si 3 N, AlN, urea solution and liquid glass. X-ray phase analysis established, that the use of plasma chemical synthesis produced the phase β-SiAlON compositions Si 5 AlON 7 with hexagonal system (Pearson symbol hP14, space group P6 3 /m. The diffractograms also show an X-ray amorphous phase and traces of initial compounds. A diagram showing the physical and chemical processes occurring during the interaction of the plasma flux with components in plasma chemical synthesis is presented.