Study of the resist deformation in nanoimprint lithography

Hirai, Yoshihiko; Fujiwara, Masaki; Okuno, Takahiro; Tanaka, Yoshio; Endo, M.; Irie, Sigeo; Nakagawa, Kazuo; Sasago, Masaru

doi:10.1116/1.1415510

Cited by 141 publications

(90 citation statements)

References 8 publications

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“…Simulations that excluded surface tension examined embossing of 200 nm thick polymer films and produced single peak deformation for W/h i < 1 and dual peak deformation for W/h i > 1 [9]. The Newtonian liquid deformations presented here agree with nonlinear solid elastic deformations [10,11] that also noted cavity geometry and initial film thickness modulate deformation mode.…”

Section: Discussionsupporting

confidence: 72%

“…When surface tension effects were removed from the simulations, smooth single or dual peaks were observed dependent on cavity width, as observed in viscous flow experiments [6]. Other simulations and experiments [10,11] investigated purely nanometer scale geometries and film thicknesses. Elastic solid simulations modeled the polymer with the nonlinear stressstrain behavior of a Moony-Rivlin material.…”

Section: Introductionmentioning

confidence: 75%

“…All of the referenced studies state that decreasing h i or increasing h c /h i increases either the filling time [7,8,20] or the filling pressure [10,11]. For the present viscous liquid simulations, time and pressure are linearly related in the non-dimensionalization.…”

Section: Discussionmentioning

confidence: 97%

“…Prior simulations of NIL have treated the polymer as either a viscous Newtonian fluid [9] or nonlinear elastic solid material [10,11]. Solid mechanics simulations with a MoonyRivlin constitutive model [10,11] used the commercially-available MARC program, based on the finite element method and rectangular plane strain elements, to model the polymer as a rubber elastic above T g .…”

Section: Simulation Overviewmentioning

confidence: 99%

“…Solid mechanics simulations with a MoonyRivlin constitutive model [10,11] used the commercially-available MARC program, based on the finite element method and rectangular plane strain elements, to model the polymer as a rubber elastic above T g . Fluid mechanics simulations [9] used the commercial computational fluid dynamics code CFD-ACE, based on the finite volume method, to simulate NIL on an Eulerian grid using the volume of fluid method (VOF) to track the deforming polymer interface.…”

Section: Simulation Overviewmentioning

confidence: 99%

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Impact of polymer film thickness and cavity size on polymer flow during embossing : towards process design rules for nanoimprint lithography.

Schunk¹,

King

Sun³

et al. 2006

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This paper presents continuum simulations of polymer flow during nanoimprint lithography (NIL). The simulations capture the underlying physics of polymer flow from the nanometer to millimeter length scale and examine geometry and thermophysical process quantities affecting cavity filling. Variations in embossing tool geometry and polymer film thickness during viscous flow distinguish different flow driving mechanisms. Three parameters can predict polymer deformation mode: cavity width to polymer thickness ratio, polymer supply ratio, and Capillary number. The ratio of cavity width to initial polymer film thickness determines vertically or laterally dominant deformation. The ratio of indenter width to residual film thickness measures polymer supply beneath the indenter which determines Stokes or squeeze flow. The local geometry ratios can predict a fill time based on laminar flow between plates, Stokes flow, or squeeze flow. Characteristic NIL capillary number based on geometry-dependent fill time distinguishes between capillary or viscous driven flows. The three parameters predict filling modes observed in published studies of NIL deformation over nanometer to millimeter length scales. The work seeks to establish process design rules for NIL and to provide tools for the rational design of NIL master templates, resist polymers, and process parameters. 4

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Section: Discussionsupporting

confidence: 72%