Study of the linewidth measurement with scanning electron microscope based on laser interference principle

Yin, Bin; Chu, Mingzhang; Xu, Guanglu; Xue, L.; Liu, Junbiao; Chen, Daixie; Han, Li; Jiang, Chao; Cai, Xiaoyong

doi:10.1117/12.2505766

9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- And Nano-Optics, Catenary Optics 2019

DOI: 10.1117/12.2505766

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Study of the linewidth measurement with scanning electron microscope based on laser interference principle

Bin Yin¹,

Mingzhang Chu²,

Guanglu Xu³

et al.

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Study of the linewidth measurement with scanning electron microscope based on laser interference principle

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References 7 publications

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