-It is common practice to identify the insulation faults of GIS through monitor the contents of SF 6 decomposed components. Partial discharges (PD) could lead to the decomposition of SF 6 dielectric, so new reactions usually occur in the mixture of the newly decomposed components including traces of H 2 O and O 2 . The new reactions also cause the decomposed components to differ due to the different amounts of H 2 O and O 2 even under the same strength of PD. Thus, the accuracy of assessing the insulation faults is definitely influenced when using the concentration and corresponding change of decomposed components. In the present research, a needle-plate electrode was employed to simulate the PD event of a metal protrusion insulation fault for two main characteristic components SO 2 F 2 and SOF 2 , and to carry out influence analysis of trace H 2 O and O 2 on the characteristic components. The research shows that trace H 2 O has the capability of catching an F atom, which inhibits low-sulfide SF x from recombining into high-sulfide SF 6 . Thus, the amount of SOF 2 strongly correlates to the amount of trace H 2 O, whereas the amount of SO 2 F 2 is weakly related to trace H 2 O. Furthermore, the dilution effect of trace O 2 on SOF 2 obviously exceeds that of SO 2 F 2 .