Study of Spacer Etching with PR Approach

Yang, Yuhao; Che, Siyuan; Meng, Xiangguo; Lu, Lian; Li, Quanbo; Huang, Jun; Zhang, Yu

doi:10.1109/cstic58779.2023.10219331

2023 China Semiconductor Technology International Conference (CSTIC) 2023

DOI: 10.1109/cstic58779.2023.10219331

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Study of Spacer Etching with PR Approach

Yuhao Yang,

Siyuan Che,

Xiangguo Meng

et al.

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Study of Spacer Etching with PR Approach

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