Study of Silicon Nitride Film for Rear Surface Passivation

Ohshita, Yoshio; Sumita, I.; Nakamura, Kotaro; Saruwatari, Tetsuya; Imai, Daisuke; Aoki, Marcelo Saldanha; Kojima, Takahito; Ogishi, A.; Mishina, Ken

doi:10.4229/28theupvsec2013-2dv.4.20

28th European Photovoltaic Solar Energy Conference and Exhibition; 2044-2046 2013

DOI: 10.4229/28theupvsec2013-2dv.4.20

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Study of Silicon Nitride Film for Rear Surface Passivation

Yoshio Ohshita

I. Sumita²,

Kotaro Nakamura³

et al.

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2015

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X-ray evaluation of electronic and chemical properties and film structures in SiN passivation layer on crystalline Si solar cells

Yamashita¹,

Ikeno²,

Tachibana³

et al. 2015

Jpn. J. Appl. Phys.

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We investigated the electronic chemical properties and film structures in SiN passivation layers on crystalline Si by X-ray photoelectron spectroscopy (XPS) and X-ray reflectometry (XRR). From XPS analyses, a N-rich component (N-Si-N) and oxygen mixing were observed at the interface. The longest lifetime was obtained after post deposition annealing at 600 °C, where the N-rich layer was the thinnest with small peak height. Therefore, longer lifetime could be obtained as the N concentration at the interface decreased. The film consisted of three SiN layers and one SiO 2 layer, as confirmed by XRR profile fitting. From the density profiles, a longer lifetime was obtained when the density gradient in the oxygen mixing layer was small. Results of XPS and XRR suggested that N at the interface significantly affected the lifetime. We believe it is important to understand the electronic chemical properties at the passivation interface to realize high-efficiency Si solar cells.

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X-ray evaluation of electronic and chemical properties and film structures in SiN passivation layer on crystalline Si solar cells

Yamashita¹,

Ikeno²,

Tachibana³

et al. 2015

Jpn. J. Appl. Phys.

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show abstract

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Study of Silicon Nitride Film for Rear Surface Passivation

Cited by 1 publication

References 0 publications

X-ray evaluation of electronic and chemical properties and film structures in SiN passivation layer on crystalline Si solar cells

X-ray evaluation of electronic and chemical properties and film structures in SiN passivation layer on crystalline Si solar cells

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