Korean. J. Mater. Res.
 2005
DOI: 10.3740/mrsk.2005.15.3.161
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Study of Selective Etching of GaAs over AlGaAs and InGaP Semiconductors in High Density Planar Inductively Coupled BCl3/SF6 Plasmas

Yoo Seungryul1,
Ryu Hyunwoo2,
Lim Wantae3
et al.
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