Study of pyrolysis of polysilazane precursor in Si C (O,N) system

Breuning, T.

doi:10.1016/s0165-2370(98)00096-5

Cited by 14 publications

(8 citation statements)

References 16 publications

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“…Similar results have been reported for as synthesized SiCN ceramics by other authors. [14][15][16] Raman spectra of the SiCN:Li-precursors 1-4 as shown in Fig. 1 support the concept that the lithiation reaction proceeds Fig.…”

Section: Resultsmentioning

confidence: 61%

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Lithium containing silazanes as precursors for SiCN:Li ceramics—A potential material for electrochemical applications

Liebau-Kunzmann

Fasel

Kolb

et al. 2006

Journal of the European Ceramic Society

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Section: Resultsmentioning

confidence: 61%

“…In general for organosilazanes, the evaporation of methane starts at temperatures of about 400-500 • C. [14][15][16][17] It is remarkable that the lithiated polysilazanes give off methane at a significantly lower temperature. The first loss of methane (m/z = 16) was detected at around 200 • C as is shown for sample 4 in Fig.…”

Section: Resultsmentioning

confidence: 99%

Lithium containing silazanes as precursors for SiCN:Li ceramics—A potential material for electrochemical applications

Liebau-Kunzmann

Fasel

Kolb

et al. 2006

Journal of the European Ceramic Society

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“…From Figure 6, when the precursors were pyrolyzed at the temperatures from 1300 and 1500°C, it could be seen that the organic groups such as SiH, CC, NH, and CH completely disappeared. When the precursors were pyrolyzed at 1300°C, the peaks of SiN, SiO, and SiC overlapped in a very broad range of wavenumber, whereas when the precursors were pyrolyzed at 1500°C, the peaks became sharper because of the carbothermal reduction between the silica and the free carbon, as shown in Scheme 22. Therefore, the intensity of SiO lowered and that of SiC increased.…”

Section: Resultsmentioning

confidence: 98%

The synthesis of SiCON ceramics through precursor method

Luo

Zhang

Liu

et al. 2012

J of Applied Polymer Sci

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A polymeric precursor, polysiloxazane (PSON), for SiCON ceramics has been synthesized by the partial hydrolysis of MeViSiCl 2 , MeHSiCl 2 , and MeSiCl 3 followed by ammonolysis reaction of the hydrolyzed intermediates with NH 3 . The structure and thermal properties of the polymeric precursor were investigated by means of Fourier transfer infrared spectra (FTIR), 1 H-NMR, 29 Si-NMR, gel permeation chromatography, and thermogravimetric analysis. The structure of the SiCON ceramics derived from the pyrolysis of PSON was characterized by FTIR and X-ray diffraction. The as-synthesized PSON produced mainly a-Si 3 N 4 crystalline phase during pyrolysis at 1500 C under N 2 atmosphere, whereas when pyrolyzed at 1500 C under Ar atmosphere, crystalline phases of a/b-SiC and/or a-Si 3 N 4 were detected. V C 2012 Wiley Periodicals, Inc. J fAppl Polym Sci 126: [853][854][855][856][857][858][859] 2012

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“…We have previously used the DRIFTS technique to study the scission of functional groups during the pyrolysis of a polymer film and its conversion into a ceramic . Other groups ,, have also used the DRIFTS technique to study the heat treatment of organosilicon materials to produce siloxane films.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of SiC-Type Films Using Low-Energy Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Subsequent Pyrolysis

Nguyen

Tabarkhoon

Welchert

et al. 2023

Ind. Eng. Chem. Res.

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Silicon carbide (SiC) is a promising material for a variety of applications in the biomedical, aerospace, and energy industries. Solution-phase techniques have long been used to deposit precursor films prior to pyrolysis into SiC, but they tend to face difficulties with substrate compatibility and the use of toxic solvents. In this study, we introduce a solventless synthesis route for fabricating SiC-type films by depositing an organosilicon copolymer poly(vinylphenyldimethylsilane-co-divinylbenzene) (p(VPDMS-co-DVB)) film using low-energy plasma chemical vapor deposition (PECVD) followed by subsequent pyrolysis. The chemical structure of the film was systematically studied in situ during pyrolysis as a function of temperature using diffuse reflection infrared Fourier transform spectroscopy (DRIFTS). The majority of the functional groups were found to have disappeared by a temperature of 800 °C, with most of the mass loss occurring between 350 and 520 °C. Thermogravimetric analysis (TGA) was used to measure the loss of mass as the pyrolysis temperature was increased, and the observed pyrolysis rates were compared to estimates of such rates from the DRIFTS analysis. Our proposed synthesis route provides a scalable and solventless method of producing SiC-type ceramic films for such applications as high-temperature sensors and membranes.

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Study of pyrolysis of polysilazane precursor in Si C (O,N) system

Cited by 14 publications

References 16 publications

Lithium containing silazanes as precursors for SiCN:Li ceramics—A potential material for electrochemical applications

Lithium containing silazanes as precursors for SiCN:Li ceramics—A potential material for electrochemical applications

The synthesis of SiCON ceramics through precursor method

Fabrication of SiC-Type Films Using Low-Energy Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Subsequent Pyrolysis

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