Study of Polysilicon Texture with Acidic Corroding

Abstract

Many new methods for polysilicon texture are invented in solar cell preparation and isotropic acidic corroding has become one of the primary methods for its advantage of fitting for mass production. It is an unavoidable problem that how to evaluate results under different reagent ratio and different reaction time. On the base of Genetic Algorithm (GA), methods for evaluating the best process parameters are given out aided by artificial neural network (ANN), It is proved by experiments that this method can find out the best combinations of process parameters globally.