Abstract:Approaches to improve the strain gradient of low-temperaturedeposited LPCVD polycrystalline silicon-germanium (poly-SiGe) for MEMS inertial sensor applications are investigated. Correlation between the strain gradient and film microstructure is found, and the effects of film deposition conditions on film microstructure are studied. Boron-doped poly-SiGe films generally have vertically oriented grains, either conical or columnar in shape. Films with small strain gradient usually have columnar grain structure wi… Show more
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