Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering

Fu, Yuwei; Ji, Peng; He, Mengsha; Huang, Peijun; Huang, Guobin; Huang, Weihua

doi:10.1007/s11090-023-10425-9

Plasma Chem Plasma Process

2023

DOI: 10.1007/s11090-023-10425-9

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Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering

Yuwei Fu,

Peng Ji,

Mengsha He

et al.

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Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering

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References 37 publications

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